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STMicroelectronics has a long history and demonstrated expertise in MEMS sensors and actuators. As the first major manufacturer to start high-volume MEMS production on 200mm wafers in 2006, ST launched the consumer MEMS revolution by making motion sensors small, accurate, and affordable through the combination of innovative product design, deep application expertise, and industry-leading process and packaging technology.

Since then ST has continued to grow and diversify its portfolio into new types of devices and application segments. Today, in addition to its successes in motion sensors for consumer markets, the company features products dedicated to automotive, industrial and medical markets with a dedicated manufacturing flow guaranteeing high quality and reliability.

Know more about our MEMS technology processes for automotive and industrial.

An industry-leading process technology

In addition to using the well-understood and valuable electrical properties of silicon, MEMS (Micro-Electro-Mechanical systems) sensors leverage silicon’s unique mechanical properties to integrate mechanical structures able to sense acceleration, rotation, angular rate, vibration, displacement, heading, and other physical and environmental properties. ST manufactures its MEMS using proprietary micromachining processes that share processing steps derived from basic integrated circuit techniques. These steps produce a circuit that combines electrical circuits and 3-dimensional mechanical structures